Takashi Taniguchi and Masao Doi
,
Japanese Journal of Applied Physics Vol.43 , No.10, 6968-6973, (2004)
,
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Takashi Taniguchi and Masao Doi .
<a href='https://edu.yz.yamagata-u.ac.jp/developer/Asp/Youzan/Academic/@Achievement.asp?nAchievementID=17233'>
<q><cite>
Modeling of the Spin Coating Film Transfer and Hot Pressing Method
in the new LSI process I --- the film transfer process ---
</q></cite>
</a>.
, .
2004.
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